Electrical and structural characterization of defects introduced in p-SiGe during low energy erbium implantation
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F. D. Auret | A. Vantomme | V. Moshchalkov | M. Mamor | M. Hayne | B. Pipeleers | J. Maes
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F. D. Auret | A. Vantomme | V. Moshchalkov | M. Mamor | M. Hayne | B. Pipeleers | J. Maes