COLK cell : A new embedded DRAM architecture for advanced CMOS nodes
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S. Cremer | E. Yesilada | S. Gaillard | O. Goducheau | H. Petiton | M. Vernet | C. Jenny | F. Lalanne
[1] K. McStay,et al. Scaling deep trench based eDRAM on SOI to 32nm and Beyond , 2009, 2009 IEEE International Electron Devices Meeting (IEDM).
[2] Takaho Tanigawa,et al. Device Technology for embedded DRAM utilizing stacked MIM(Metal-Insulator-Metal) Capacitor , 2006, IEEE Custom Integrated Circuits Conference 2006.
[3] S. Barnola,et al. Highly Reliable TiN/ZrO2/TiN 3D Stacked Capacitors for 45 nm Embedded DRAM Technologies , 2006, 2006 European Solid-State Device Research Conference.