论文信息 - Composition and texture of TiN thin films fabricated by ECR enhanced sputtering deposition - 字舞流文

Composition and texture of TiN thin films fabricated by ECR enhanced sputtering deposition

Huaping Liu | Guojia Ma | C. Liang | G. Cheng | R. Zheng | Jieni Li | Huafang Zhang | Yanli Jiang | Jiewei Li