Hybrid integrated micromachined receiver for 77 GHz millimeter wave identification systems

This paper presents the design, fabrication and millimeter wave measurements of a w-band (75-110 GHz) hybrid integrated micromachined receiver, an integrated double-folded slot antenna has been manufactured using silicon micromachining techniques. The receiver includes a flip chipped diode, which is used as a detector and modulator to demonstrate a millimeter wave identification (MMID) system, the experimental 77 GHz results show, that backscattering based communication used in radio frequency identification (RFID) is feasible also in the millimeter wave frequency range.