论文信息 - Investigation of damage behaviour and isolation effect of n-type 6H-SiC by implantation of oxygen - 字舞流文

Investigation of damage behaviour and isolation effect of n-type 6H-SiC by implantation of oxygen

C. Zetterling | Zhitang Song | Chenglu Lin | M. Östling | Lianwei Wang | Jipo Huang | X. Duo