Low-loss photonic crystal defect waveguides in InP

We have fabricated high-quality planar photonic crystal defect waveguides in InP/InGaAsP material. Using Fourier analysis of the Fabry-Perot fringes obtained in transmission, we derive the propagation losses. Values as small as 1.8 dB/mm for waveguides consisting of three rows of missing holes (W3) were measured. We believe that the reduction in losses is due to the high quality of etching carried out using a high beam voltage–current ratio regime of chemically assisted ion-beam etching.

[1]  C. W. Jurgensen,et al.  Microscopic uniformity in plasma etching , 1992 .

[2]  Henri Benisty,et al.  Radiation losses of waveguide-based two-dimensional photonic crystals: Positive role of the substrate , 2000 .

[3]  Theory of loss measurements of Fabry Perot resonators by Fourier analysis of the transmission spectra. , 1997, Optics letters.

[4]  M. Kamp,et al.  Tunable distributed feedback laser with photonic crystal mirrors , 2003 .

[5]  G. Duan,et al.  Optical characterisation of 2D InP-based photonic crystals fabricated by inductively coupled plasma etching , 2002 .

[6]  B. Jaskorzynska,et al.  Characterization of In-Plane Resonant Cavities with Photonic Crystal Boundaries Etched in InP-Based Heterostructure , 2002, 2002 28TH European Conference on Optical Communication.

[7]  Thomas F. Krauss,et al.  Planar photonic crystal waveguide devices for integrated optics , 2003 .

[8]  Henri Benisty,et al.  Low-loss channel waveguides with two-dimensional photonic crystal boundaries , 2000 .

[9]  Henri Benisty,et al.  Two-mode fringes in planar photonic crystal waveguides with constrictions: a probe that is sensitive to propagation losses , 2002 .

[10]  Henri Benisty,et al.  Radiation losses in planar photonic crystals: two- dimensional representation of hole depth and shape by an imaginary dielectric constant , 2003 .

[11]  A. Talneau,et al.  Quantitative measurement of low propagation losses at 1.55 mum on planar photonic crystal waveguides. , 2001, Optics letters.

[12]  P. Lalanne,et al.  Photonic crystal waveguides: Out-of-plane losses and adiabatic modal conversion , 2001 .

[13]  B. Lombardet,et al.  Hole depth- and shape-induced radiation losses in two-dimensional photonic crystals , 2003 .