论文信息 - Effect of RuO2 electrode on polarization fatigue resistance of PbZr0.52Ti0.48O3 thin films

Effect of RuO2 electrode on polarization fatigue resistance of PbZr0.52Ti0.48O3 thin films

Abstract Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3, PZT) films of thickness 300 nm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/Si substrates. Either a ruthenium dioxide (RuO2) or platinum (Pt) top electrode was deposited on each film. The ferroelectric properties and the fatigue and current characteristics of the films were investigated. The film has a higher fatigue resistance but also a higher leakage current when one or both of the electrodes are made of RuO2. The RuO2/PZT/RuO2 film exhibits negligible polarization fatigue, while the polarization of the RuO2/PZT/Pt and Pt/PZT/RuO2 films decreases by about 40% after 109 switchings. This suggests that the polarization fatigue in the PZT films is controlled not only by the top RuO2/PZT interface but also by the bottom PZT/RuO2 interface.

C. Choy | B. Wang | H. Chan | K. Kwok | Kwok Ying Tong

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