Error compensation algorithm and performance evaluation for phase-shifting interferometer

Phase retrieval algorithms with a small number of grabbed buckets are very helpful to the phase-shifting interferometer (PSI) required real-time processing, so the algorithms within five buckets are very practical and are given more attention. In the paper, new 4 and 5-bucket algorithms are developed to compensate phase-shift deviation and detector nonlinearity. Numerical simulations and experiments performed on a Mach-Zehnder interferometer are carried out and verify that these two compensation algorithms hold a high degree of tolerance for two dominate error sources.

[1]  J. Schwider,et al.  Digital wave-front measuring interferometry: some systematic error sources. , 1983, Applied optics.

[2]  P. Hariharan Digital Phase-Shifting Interferometry , 1987, Other Conferences.

[3]  K Creath,et al.  Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry. , 1995, Applied optics.

[4]  K. Hibino,et al.  Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts , 1997 .

[5]  Chris P. Brophy,et al.  Effect of intensity error correlation on the computed phase of phase-shifting interferometry , 1990 .

[6]  F. bai,et al.  Modified Fourier-transform method for phase-shift calibration , 2011 .

[7]  C. J. Morgan Least-squares estimation in phase-measurement interferometry. , 1982, Optics letters.

[8]  B. Bhushan,et al.  An Optical Profilometer for Surface Characterization of Magnetic Media , 1984 .

[9]  D. J. Brangaccio,et al.  Digital wavefront measuring interferometer for testing optical surfaces and lenses. , 1974, Applied optics.

[10]  P. Carré Installation et utilisation du comparateur photoélectrique et interférentiel du Bureau International des Poids et Mesures , 1966 .

[11]  K Creath,et al.  Phase-shifting errors in interferometric tests with high-numerical-aperture reference surfaces. , 1994, Applied optics.

[12]  Pascal Picart,et al.  Error analysis for a Mach-Zehnder type speckle interferometer , 2001 .

[13]  Kieran G. Larkin,et al.  Design and assessment of symmetrical phase-shifting algorithms , 1992 .

[14]  Changhui Rao,et al.  Phase-shifts n pi/2 calibration method for phase-stepping interferometry. , 2009, Optics express.