UNCERTAINTY ANALYSIS OF MICRO DIFFERENTIAL PRESSURE SENSOR USING INTERVAL ANALYSIS

A methodology for robust design analysis of micromechanical systems using interval methods is presented by considering piezo resistive micro differential pressure sensor with uncertainty in its parameters. The proposed method guides the design of micro sensor to achieve a robust and reliable design in a most efficient way. The uncertainty analysis is carried out numerically using Coventorware and analytically using Intlab. The major design objectives in any device design, is to meet the required functional parameters and the reliability of the device. The functional parameters depend on the geometry of the structure, material properties and process parameters. The major difficulty the designer faces is the dimensions and properties used in the simulation of the MEMS devices can not be exactly followed during fabrication. In order to overcome this problem, the designer must test the device in simulation for bound of parameters involved in it. This paper demonstrates the use of interval method to assess the piezo resistive micro differential pressure sensor under the presence of manufacturing and process uncertainties. The uncertainty analysis is carried out numerically using Coventorware and analytically using Intlab.

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