论文信息 - Characteristic resonance features of SOI-CMOS-compatible silicon nanoelectromechanical doubly-clamped beams up to 330 MHz - 字舞流文

Characteristic resonance features of SOI-CMOS-compatible silicon nanoelectromechanical doubly-clamped beams up to 330 MHz

M. Shikida | H. Mizuta | Y. Tsuchiya | C. Dupré | F. Hassani | E. Ollier | Yilin Feng | C. Giotis | N. Harada | Christos Giotis