On-chip electrometer using MEMS parallel-plate pull-in sensing

Microelectromechanical Systems (MEMS) have been proposed as DC electrical metrology references. The design reported here is the first to enhance the qualities of a MEMS DC reference with potential tuning and sensing via an isolated and monolithically integrated MEMS technology and thereby, convert a stable parallel-plate voltage reference to a simple, sensitive, low-burden voltage sensor. This on-chip system reliably measures unknown potentials ranging from −60 to 60V with sampling times less than 10 ms. In the initial design, the system is used to measure atto-amp leakage current though 10 PΩ, suspended, MEMS isolation.

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