A CMOS focal-plane array for heterodyne terahertz imaging

In this paper we present a focal-plane array (FPA) for heterodyne imaging at 0.65-THz in a low-cost 0.25-µm CMOS process technology. The 3×5 pixel array is fully integrated on chip and consists of differential patch antennas, NMOS square-law mixers, and 43-dB low-IF amplifiers. The NMOS square-law mixers are based on distributed resistive self-mixing and facilitate mixing well beyond the cutoff frequency of the technology. First 0.65-THz heterodyne imaging results are presented.

[1]  Michael S. Shur,et al.  Closing the Gap: Plasma Wave Electronic Terahertz Detectors , 2007 .

[2]  Michael S. Shur,et al.  Plasma wave electronics: novel terahertz devices using two dimensional electron fluid , 1996 .

[3]  Arnulf Leuther,et al.  A G-band (140 - 220 GHz) microstrip MMIC mixer operating in both resistive and drain-pumped mode , 2008, 2008 IEEE MTT-S International Microwave Symposium Digest.

[4]  A. Lisauskas,et al.  A CMOS focal-plane array for terahertz imaging , 2008, 2008 33rd International Conference on Infrared, Millimeter and Terahertz Waves.

[5]  Stephen A. Maas,et al.  Microwave Mixers , 1986 .

[6]  B. Schiek,et al.  Power Detector with GaAs Field Effect Transistors , 1992, 1992 22nd European Microwave Conference.

[7]  A. Leuther,et al.  A 220 GHz (G-Band) Microstrip MMIC Single-Ended Resistive Mixer , 2008, IEEE Microwave and Wireless Components Letters.

[8]  Alvydas Lisauskas,et al.  A 0.65 THz Focal-Plane Array in a Quarter-Micron CMOS Process Technology , 2009, IEEE Journal of Solid-State Circuits.

[9]  M. Shur,et al.  Plasma wave detection of terahertz radiation by silicon field effects transistors: Responsivity and noise equivalent power , 2006 .

[10]  D. Knoll,et al.  High-performance BiCMOS technologies without epitaxially-buried subcollectors and deep trenches , 2006, 2006 International SiGe Technology and Device Meeting.

[11]  Michael S. Shur,et al.  Field effect transistor as heterodyne terahertz detector , 2008 .

[12]  Mikko Kärkkäinen,et al.  V-band balanced resistive mixer in 65-nm CMOS , 2007, ESSCIRC 2007 - 33rd European Solid-State Circuits Conference.

[13]  Michael S. Shur,et al.  Plasma wave detection of sub-terahertz and terahertz radiation by silicon field-effect transistors , 2004 .

[14]  Ullrich R. Pfeiffer,et al.  A 600-GHz CMOS focal-plane array for terahertz imaging applications , 2008, ESSCIRC 2008 - 34th European Solid-State Circuits Conference.

[15]  J. Hesler,et al.  Responsivity and Noise Measurements of Zero-Bias Schottky Diode Detectors , 2008 .