A low-power high-flow shape memory alloy wire gas microvalve

In this paper the use of shape memory alloy (SMA) wire actuators for high gas flow control is investigated. A theoretical model for effective gas flow control is presented and gate microvalve prototypes are fabricated. The SMA wire actuator demonstrates the robust flow control of more than 1600 sccm at a pressure drop of 200 kPa. The valve can be successfully switched at over 10 Hz and at an actuation power of 90 mW. Compared to the current state-of-the-art high-flow microvalves, the proposed solution benefits from a low-voltage actuator with low overall power consumption. This paper demonstrate that SMA wire actuators are well suited for high-pressurehigh-flow applications.

[1]  G. Stemme,et al.  Wafer-Scale Manufacturing of Bulk Shape-Memory-Alloy Microactuators Based on Adhesive Bonding of Titanium–Nickel Sheets to Structured Silicon Wafers , 2009, Journal of Microelectromechanical Systems.

[2]  G. Stemme,et al.  Wafer-level integration of NiTi shape memory alloy wires for the fabrication of microactuators using standard wire bonding technology , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[3]  A.K. Henning.  Improved gas flow model for microvalves , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[4]  Peter J. Hesketh,et al.  Microvalve for Fuel Cells and Miniature Gas Chromatographic System , 2003 .

[5]  Peter J. Hesketh,et al.  A bistable electromagnetically actuated rotary gate microvalve , 2008 .

[6]  Y. Haga,et al.  Materials and Processes in Shape Memory Alloy , 2011 .

[7]  Chong H. Ahn,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering a Review of Microvalves , 2022 .

[8]  Manfred Kohl,et al.  Shape Memory Microactuators , 2004 .

[9]  J. Van Humbeeck,et al.  Shape Memory Alloys: A Material and a Technology , 2001 .

[10]  R. P. Taylor,et al.  A piezoelectric microvalve for cryogenic applications , 2007 .

[11]  Göran Stemme,et al.  SMA Microvalves for Very Large Gas Flow Control Manufactured Using Wafer-Level Eutectic Bonding , 2012, IEEE Transactions on Industrial Electronics.

[12]  Peter Enoksson,et al.  A high-stroke, high-pressure electrostatic actuator for valve applications , 2002 .

[13]  G. Stemme,et al.  Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows , 2006, Journal of Microelectromechanical Systems.

[14]  G. Stemme,et al.  Design and Wafer-Level Fabrication of SMA Wire Microactuators on Silicon , 2010, Journal of Microelectromechanical Systems.

[15]  Dominiek Reynaerts,et al.  Wafer-level mechanical and electrical integration of SMA wires to silicon MEMS using electroplating , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.