Thermal desorption of InSb surface oxides

We have investigated methods of chemical preparation and thermal treatments of InSb substrates to produce InSb surfaces suitable for subsequent molecular beam epitaxy. Etching in a solution of lactic acid: HNO3:HCl was shown to produce an oxide surface layer which could be thermally desorbed. Growth on surfaces prepared in this manner produced precipitate‐free substrate–epilayer interfaces.