ICP etching of InP and its applications in photonic circuits
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Fouad Karouta | Meint K. Smit | Jos J. G. M. van der Tol | Yucai C. Zhu | Erik Jan Geluk | J. J. M. Binsma | Yucai Zhu | F. Karouta | J. V. D. van der Tol | M. Smit | E. Geluk | J. Binsma
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