论文信息 - Silicon chip based near-infrared and mid-infrared optical spectroscopy for volatile organic compound sensing

Silicon chip based near-infrared and mid-infrared optical spectroscopy for volatile organic compound sensing

We compared different on-chip silicon based absorption sensors for the detection of xylene in water in both near-infrared and mid-infrared with detection limit down to 1ppb. Strip waveguide, slot waveguide and PC-based chip integrated optical absorption spectroscopy devices are compared in near-infrared and mid-infrared. The results provide a route for enhanced sensitivity while retaining device miniaturization.

Ray T. Chen | Swapnajit Chakravarty | Yi Zou | Xiaochuan Xu | Weicheng Lai

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