Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers
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D. Tsvetanova | T. Ivanov | B. Govoreanu | I. Radu | F. Lazzarino | A. Potočnik | L. Souriau | D. Wan | A. Pacco | A. Thiam | S. Couet | X. Piao | Y. Canvel | D. Vangoidsenhoven | M. Mongillo | J. Jussot | J. Verjauw | R. Acharya