论文信息 - Isotropic Etching of Si1-xGex Buried Layers Selectively to Si for the Realization of Advanced Devices - 字舞流文

Isotropic Etching of Si1-xGex Buried Layers Selectively to Si for the Realization of Advanced Devices

Christian Arvet | Jean-Michel Hartmann | Stephan Borel | Christian Vizioz | Thierry Billon | G. Rabille | Véronique Caubet | Jeremy Bilde | Anissa Cherif