Memory effect and retention property of Ge nanocrystal embedded Hf-aluminate high-k gate dielectric

The memory effect and retention characteristics of a Ge nanocrystal (NC) floating gate memory structure consisting of Hf-aluminate (HfAlO) tunnelling and control oxides have been investigated by means of high-frequency capacitance–voltage (C–V) and capacitance–time (C–t) measurements. The trilayer structure (HfAlO/Ge-NC/HfAlO) on Si was fabricated by pulsed-laser deposition at a relatively low temperature. A high-resolution transmission electron microscopy study revealed that the Ge nanocrystals are about 5 nm in diameter and are well distributed within the amorphous HfAlO matrix. The memory effect was revealed by the counter-clockwise hysteresis loop in the C–V curves and a high storage charge density of about 1 × 1013 cm−2 and a large flat-band voltage shift of 3.6 V have been achieved. An 8% decay in capacitance after 104 s in the C–t measurement suggests a promising retention property of Ge NC charge storage. The effects of size/density of the Ge NC, the tunnelling and control oxide layer thicknesses and their growth oxygen partial pressure to the charge storage and charge retention characteristics have been studied.

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