Flexible, Microarray Interconnection Technique Applied to Biomedical Microdevices

Miniaturization of electronic components, sensors and actuators as well as advances in high density interconnects and hybrid integration provide a challenging technology base to the medical industry for developing a new bread of medical devices that interface directly to cells and tissues. Examples of advanced microimplants and instruments include systems for controlled drug delivery, cell sensing, tissue inspection, body fluid handling and neural stimulation. In this chapter we describe devices which are characterized by an array of multiple fine pitched microelectrodes for which novel interconnects, assembly techniques, and biocompatible packaging procedures have been developed.

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