Integrating Computer Aided Manufacturing and Process Simulation for Controlling the Production of ASlCs

The process simulator SUPREM-II has been integrated with a commercial CAM system to allow the interactive analysis and diagnosis of processing within a manufacturing environment. Data used for controlling the simulations is stored within the CAM system and the new functions are accessed through the CAM system user interface. It is shown how the new system may be used to perform feed-forward control for corrective processing. The particular relevance of this work to ASIC production is discussed. Currently the system is being used to help control processing in a low-volume ASIC manufacturing facility.