Effects of Thermal Stresses on the Frequency-Temperature Behavior of Piezoelectric Resonators

The frequency-temperature behavior of a piezoelectric crystal resonator can be predicted quite accurately if the resonator is under a stress-free and steady-state uniform temperature condition. The condition is however seldom achieved practically. Most practical resonators are subjected to thermal stresses. Conventional finite element analytical tools such as ANSYS cannot provide a sufficiently accurate model for the frequency-temperature behavior of piezoelectric quartz resonators. A new dynamic frequency-temperature model which accurately predicted the frequency-temperature behavior of quartz resonators affected by transient and steady state temperature changes was presented. Lagrangean equations for small vibrational (incremental) displacements superposed on initial thermal stresses and strains were employed. The initial thermal stresses and strains were obtained from the uncoupled heat and thermoelastic equations. The constitutive equations for the incremental displacements incorporated the temperature derivatives of the material constants. Numerical results were compared with the experimental results for a 50 MHz AT-cut quartz resonator mounted on a glass package. Good comparisons between the experimental results and numerical results from our new model were found. The differences between the thermal expansion coefficients of glass and quartz gave rise to the thermal stresses that had adverse effects on the frequency stability of resonators. Different optimal crystal cut angles of quartz, and resonator geometry were found to achieve stable frequency-temperature behavior of the resonator in a glass package. The dynamic frequency-temperature model was used in the theoretical analyses and designs of high Q, 3.3 GHz, quartz thin film resonators.

[1]  A. Ballato,et al.  Thickness vibrations of a piezoelectric plate with dissipation , 2004, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[2]  Y. Yong,et al.  Application of a DC bias to reduce acceleration sensitivity in quartz resonators , 2004, IEEE Ultrasonics Symposium, 2004.

[3]  John R. Vig,et al.  Straight crested wave analysis of quartz MEMS ring electroded mesa resonators , 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

[4]  Arthur Ballato,et al.  Thickness vibrations of piezoelectric plates with dissipation , 1999, 1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027).

[5]  Joseph F. Thomas Third-Order Elastic Constants of Aluminum , 1968 .

[6]  X. Markenscoff,et al.  High−frequency vibrations of crystal plates under initial stresses , 1975 .

[7]  M. Tanaka,et al.  Estimation of Quartz Resonator Q and other Figures of Merit by an Energy Sink Method , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[8]  R. Weigel,et al.  Microwave acoustic materials, devices, and applications , 2002 .

[9]  F. P. Stratton,et al.  A MEMS-based quartz resonator technology for GHz applications , 2004, Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004..

[10]  T. J. Lukaszek,et al.  Higher-Order Temperature Coefficients of the Elastic Stiffinesses and Compliances of Alpha-Quartz , 1962, Proceedings of the IRE.

[11]  H. Tiersten,et al.  First temperature derivatives of the fundamental elastic constants of quartz , 1979 .

[12]  E. W. Washburn,et al.  International Critical Tables of Numerical Data, Physics, Chemistry and Technology , 1926 .

[13]  Y. Yong,et al.  Effects of non-homogeneous thermal stresses on the frequency-temperature behavior of AT-cut quartz resonators , 2005, IEEE Ultrasonics Symposium, 2005..

[14]  T. Abbasov,et al.  A numerical investigation of the liquid flow velocity over an infinity plate which is taking place in a magnetic field , 2005 .

[15]  S. Goka,et al.  Influence of Viscosity Loss on Coupled Vibrations of Ultrahigh Frequency AT-Cut Quartz Plates , 2006 .

[16]  Pcy Lee,et al.  Frequency‐temperature behavior of thickness vibrations of doubly rotated quartz plates affected by plate dimensions and orientations , 1986 .

[17]  K. Lakin,et al.  Thin film resonator technology , 2003, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[18]  Yook-Kong Yong,et al.  Piezoelectric resonators with mechanical damping and resistance in current conduction , 2007 .

[19]  J. Richter,et al.  Anisotropic acoustic attenuation with new measurements for quartz at room temperatures , 1966, Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences.

[20]  T. Imai,et al.  On the accuracy of Mindlin plate predictions for the frequency-temperature behavior of resonant modes in AT- and SC-cut quartz plates , 1999, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.