论文信息 - Charge State of Copper-Silicide Precipitates in Silicon and its Application to the Understanding of Copper Precipitation Kinetics - 字舞流文

Charge State of Copper-Silicide Precipitates in Silicon and its Application to the Understanding of Copper Precipitation Kinetics

A. Istratov | O. Vyvenko | E. Weber | H. Hieslmair | T. Heiser | C. Flink | A. A. Istratov | Henry Hieslmair