Microscopic Hot-Carrier Degradation Modeling of SiGe HBTs Under Stress Conditions Close to the SOA Limit

We present and validate a physics-based model to describe the underlying mechanisms of hot-carrier degradation in bipolar transistors. Our analysis is based on a deterministic solution of the coupled system of Boltzmann transport equations for electrons and holes. The full-band transport model provides the energy distribution functions of the charge carriers interacting with the passivated Si–H bonds along the oxide interface. The simulation results assert the dominant role of hot holes along the emitter–base spacer oxide interface in the long-term degradation of an n-p-n SiGe heterojunction bipolar transistor under low and high-current conditions at the border of the safe-operating area. The interface trap density is calculated by incorporating an energy driven paradigm for the microscopicmechanisms of defect creation into a reaction-limitedmodelwith dispersive reaction rates. These interface traps increase the forward-mode base current via Shockley–Read–Hall recombination and degrade the overall device performance. The Gummel characteristics of a degraded device and time evolution of the excess base current for different stress conditions are verified versus the experimental data obtained for a state-of-the-art toward-terahertz SiGe HBT.

[1]  H. Kufluoglu,et al.  A Generalized Reaction–Diffusion Model With Explicit H– $\hbox{H}_{2}$ Dynamics for Negative-Bias Temperature-Instability (NBTI) Degradation , 2007, IEEE Transactions on Electron Devices.

[2]  François Marc,et al.  Investigation of the degradation mechanisms of InP/InGaAs DHBT under bias stress conditions to achieve electrical aging model for circuit design , 2011, Microelectron. Reliab..

[3]  Tibor Grasser,et al.  Understanding and Modeling the Temperature Behavior of Hot-Carrier Degradation in SiON nMOSFETs , 2016, IEEE Electron Device Letters.

[4]  G. G. Fischer,et al.  Ageing and thermal recovery of advanced SiGe heterojunction bipolar transistors under long-term mixed-mode and reverse stress conditions , 2015, Microelectron. Reliab..

[5]  J. D. Cressler,et al.  Predictive Physics-Based TCAD Modeling of the Mixed-Mode Degradation Mechanism in SiGe HBTs , 2012, IEEE Transactions on Electron Devices.

[6]  D. Klaassen,et al.  A new recombination model for device simulation including tunneling , 1992 .

[7]  J.D. Cressler Emerging SiGe HBT reliability issues for mixed-signal circuit applications , 2004, IEEE Transactions on Device and Materials Reliability.

[8]  K. Stokbro,et al.  STM-Induced Hydrogen Desorption via a Hole Resonance , 1998, cond-mat/9802304.

[9]  P. Chevalier,et al.  Towards THz SiGe HBTs , 2011, 2011 IEEE Bipolar/BiCMOS Circuits and Technology Meeting.

[10]  Tibor Grasser,et al.  Observation of Normally Distributed Energies for Interface Trap Recovery After Hot-Carrier Degradation , 2013, IEEE Electron Device Letters.

[11]  Bias- and Temperature-Dependent Accumulated Stress Modeling of Mixed-Mode Damage in SiGe HBTs , 2015, IEEE Transactions on Electron Devices.

[12]  Christoph Jungemann,et al.  A deterministic solver for the Langevin Boltzmann equation including the Pauli principle , 2007, SPIE International Symposium on Fluctuations and Noise.

[13]  Christoph Jungemann,et al.  Physics-based hot-carrier degradation model for SiGe HBTs , 2016, 2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD).

[14]  Karl Rupp,et al.  Predictive Hot-Carrier Modeling of n-Channel MOSFETs , 2014, IEEE Transactions on Electron Devices.

[15]  Peng Cheng,et al.  Reliability of SiGe HBTs for Power Amplifiers—Part II: Underlying Physics and Damage Modeling , 2009, IEEE Transactions on Device and Materials Reliability.

[16]  James H. Stathis,et al.  Anode hole injection, defect generation, and breakdown in ultrathin silicon dioxide films , 2001 .

[17]  Thomas Zimmer,et al.  Reliability of high-speed SiGe: C HBT under electrical stress close to the SOA limit , 2015, Microelectron. Reliab..

[18]  Bernd Heinemann,et al.  SiGe HBT Technology: Future Trends and TCAD-Based Roadmap , 2017, Proceedings of the IEEE.

[19]  I. Stárková Hot-carrier degradation caused interface state profile — Simulation versus experiment , 2011 .

[20]  T. Grasser,et al.  NBTI in Nanoscale MOSFETs—The Ultimate Modeling Benchmark , 2014, IEEE Transactions on Electron Devices.

[21]  John D. Cressler,et al.  A Physics-Based Circuit Aging Model for Mixed-Mode Degradation in SiGe HBTs , 2016, IEEE Transactions on Electron Devices.

[22]  J. Cressler,et al.  A new "mixed-mode" reliability degradation mechanism in advanced Si and SiGe bipolar transistors , 2002 .

[23]  G.A.M. Hurkx,et al.  Physical Description of the Mixed-Mode Degradation Mechanism for High Performance Bipolar Transistors , 2006, 2006 Bipolar/BiCMOS Circuits and Technology Meeting.

[24]  A. Stesmans Revision of H2 passivation of Pb interface defects in standard (111)Si/SiO2 , 1996 .

[25]  Karl Rupp,et al.  Modeling of Hot-Carrier Degradation in nLDMOS Devices: Different Approaches to the Solution of the Boltzmann Transport Equation , 2015, IEEE Transactions on Electron Devices.

[26]  C. Jungemann,et al.  Avalanche breakdown of pn-junctions — Simulation by spherical harmonics expansion of the Boltzmann transport equation , 2014, 2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD).

[27]  James Stasiak,et al.  Trap creation in silicon dioxide produced by hot electrons , 1989 .

[28]  I. Starkov,et al.  Charge-pumping extraction techniques for hot-carrier induced interface and oxide trap spatial distributions in MOSFETs , 2012, 2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits.

[29]  Vincenzo d'Alessandro,et al.  Influence of Scaling and Emitter Layout on the Thermal Behavior of Toward-THz SiGe:C HBTs , 2014, IEEE Transactions on Electron Devices.

[30]  M. Denais,et al.  A thorough investigation of MOSFETs NBTI degradation , 2005, Microelectron. Reliab..