Fluidic microoptics with adjustable focusing and beam steering for single cell optogenetics.

Electrically controlled micron-scale liquid lenses have been designed, fabricated and demonstrated, that provide both adjustable focusing and beam steering, with the goal of applying them to optogenetic in vivo mapping of brain activity with single cell resolution. The liquid lens is formed by the interface between two immiscible liquids which are contained in a conically tapered lens cavity etched into a fused silica substrate. Interdigitated electrodes have been patterned along the sidewall of the taper to control the liquid lens curvature and tilt. Microlenses with apertures ranging in size from 30 to 80 μm were fabricated and tunable focusing ranging from 0.25 to 3 mm and beam steering of ± 1 degree have been demonstrated.

[1]  Sung Yong Park,et al.  High-performance beam steering using electrowetting-driven liquid prism fabricated by a simple dip-coating method , 2016 .

[2]  Jason B. Stewart,et al.  Development of adaptive liquid microlenses and microlens arrays , 2013, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[3]  D. Tank,et al.  Two-photon excitation of channelrhodopsin-2 at saturation , 2009, Proceedings of the National Academy of Sciences.

[4]  J. Baret,et al.  Electrowetting: from basics to applications , 2005 .

[5]  Weisong Wang,et al.  Variable Focusing Microlens Chip for Potential Sensing Applications , 2007, IEEE Sensors Journal.

[6]  B. Zemelman,et al.  Two-photon single-cell optogenetic control of neuronal activity by sculpted light , 2010, Proceedings of the National Academy of Sciences.

[7]  Hans Zappe,et al.  Tubular astigmatism-tunable fluidic lens. , 2016, Optics letters.

[8]  Frieder Mugele,et al.  How to make sticky surfaces slippery: Contact angle hysteresis in electrowetting with alternating voltage , 2008 .

[9]  Bruno Berge,et al.  Optical design rules of a camera module with a liquid lens and principle of command for AF and OIS functions , 2010, SPIE/COS Photonics Asia.

[10]  R. Ghodssi,et al.  Microfabrication of 3 D silicon MEMS structures using grayscale lithography and deep reactive ion etching , 2003 .

[11]  D. van den Ende,et al.  Electrowetting driven optical switch and tunable aperture. , 2011, Optics express.

[12]  Hans Zappe,et al.  All-liquid dual-lens optofluidic zoom system. , 2017, Applied optics.

[13]  Reza Ghodssi,et al.  Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion et , 2005 .

[14]  B. Berge,et al.  Variable focal lens controlled by an external voltage: An application of electrowetting , 2000 .

[15]  Mangilal Agarwal,et al.  Polymer-based variable focal length microlens system , 2004 .

[16]  K. Deisseroth,et al.  Millisecond-timescale, genetically targeted optical control of neural activity , 2005, Nature Neuroscience.

[17]  G. Feng,et al.  Next-Generation Optical Technologies for Illuminating Genetically Targeted Brain Circuits , 2006, The Journal of Neuroscience.

[18]  Shin-Tson Wu,et al.  Dielectrophoretically tunable optofluidic devices , 2013 .

[19]  Edward S Boyden,et al.  Three-dimensional multiwaveguide probe array for light delivery to distributed brain circuits. , 2012, Optics letters.

[20]  Yeshaiahu Fainman,et al.  Optofluidic devices and applications in photonics, sensing and imaging. , 2012, Lab on a chip.

[21]  S. Kuiper,et al.  Variable-focus liquid lens for miniature cameras , 2004 .

[22]  Luke P. Lee,et al.  Tunable liquid-filled microlens array integrated with microfluidic network. , 2003, Optics express.

[23]  Stefan R. Pulver,et al.  Independent Optical Excitation of Distinct Neural Populations , 2014, Nature Methods.

[24]  Jason Heikenfeld,et al.  A full description of a simple and scalable fabrication process for electrowetting displays , 2009 .

[25]  S. Osher,et al.  A level set approach for computing solutions to incompressible two-phase flow , 1994 .

[26]  Amir Hirsa,et al.  Electrochemically activated adaptive liquid lens , 2005 .

[27]  F. Mugele,et al.  High speed adaptive liquid microlens array. , 2012, Optics express.

[28]  Behrouz Abedian,et al.  Irreversible electrowetting on thin fluoropolymer films. , 2007, Langmuir : the ACS journal of surfaces and colloids.

[29]  Michael B. Frish,et al.  Fabrication of three-dimensional mode converters for silicon-based integrated optics , 2003 .

[30]  E. Isacoff,et al.  Scanless two-photon excitation of channelrhodopsin-2 , 2010, Nature Methods.

[31]  Jason Heikenfeld,et al.  Agile wide-angle beam steering with electrowetting microprisms. , 2006, Optics express.

[32]  D. Psaltis,et al.  Developing optofluidic technology through the fusion of microfluidics and optics , 2006, Nature.

[33]  V. Bright,et al.  Focus-tunable low-power electrowetting lenses with thin parylene films. , 2015, Applied optics.

[34]  Bruno Berge,et al.  Two liquids wetting and low hysteresis electrowetting on dielectric applications. , 2009, Langmuir : the ACS journal of surfaces and colloids.