The design and simulation of a novel out-of-plane micro electrostatic actuator

This paper presents a mechanism of developing a novel out-of-plane micro electrostatic actuator capable of causing large out-of-plane deflection. The performance of the actuator is evaluated and simulated by MEMCAD software. Initial analysis results indicated that the usage of both the novel U-shape suspension beam and the electrostatic actuation mechanism permit large rotations motion with respect to the increment of the numbers of electrodes. Moreover, stable rotational motion can be achieved by varying the dimensions of electrode and gap spacing. This design advantage brings the possibility of developing other three-dimensional (3D) structures for on and/or out-of-wafer applications such as optical switch or display.

[1]  Weileun Fang,et al.  A novel microelectrostatic torsional actuator , 2000 .

[2]  M. R. Douglass,et al.  A MEMS-based projection display , 1998, Proc. IEEE.

[3]  Weileun Fang,et al.  A novel single-layer bi-directional out-of-plane electrothermal microactuator , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[4]  W. Riethmuller,et al.  Applications of silicon microactuators based on bimorph structures , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[5]  M. Wu.  A low voltage micromachined optical switch by stress-induced bending , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[6]  R. Muller,et al.  Magnetically actuated, addressable microstructures , 1997 .

[7]  Freddie Shing-Hong Lin,et al.  An electromagnetic MEMS 2/spl times/2 fiber optic bypass switch , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[8]  M. Wu,et al.  A scanning micromirror with angular comb drive actuation , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[9]  Freddie Shing-Hong Lin,et al.  An Electromagnetic MEMS 2 x 2 Fiber Optic Bypass Switch 1 A4.08P , 1997 .