Probing Systems in Dimensional Metrology

Dimensional parameters are the most commonly encountered quality characteristics of workpieces. The measuring process for testing conformance of those characteristics contains the important sub-process of probing the surface. A huge variety of probing systems for performing different measurement tasks on the shop floor, as well as in the metrological environment, have been developed. In coordinate measuring machines (CMM) probing systems must ensure reproducibility of the sensing operation even in the sub-micrometer range. This paper describes requirements, different principles and characteristics of tactile probing systems in dimensional metrology, with examples of several probing systems that are used in practice.

[1]  Profile measurement of high aspect ratio micro structures using a tungsten carbide micro cantilever coated with PZT thin films , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[2]  Simone Carmignato,et al.  A New Method for Thread Calibration on Coordinate Measuring Machines , 2003 .

[3]  Ted Busch.  Fundamentals of Dimensional Metrology , 1964 .

[4]  A. Chouinard.  Linear Gap Displacement Transducer Sheds Light on Proximity Sensing , 2001 .

[5]  Sarwat Zahwi,et al.  Some effects of stylus force on scratching surfaces , 2001 .

[6]  Takahisa Masuzawa,et al.  The vibroscanning method for the measurement of micro-hole profiles , 1999 .

[7]  Knut Kröger,et al.  Topographiemessungen technischer Oberflächen mit einer Streulichtanordnung (Topography Measurements of Engineering Surfaces with Optical Scatterometry) , 2003 .

[8]  Herbert Edelsbrunner,et al.  Three-dimensional alpha shapes , 1994, ACM Trans. Graph..

[9]  Takashi Miyoshi,et al.  Development of The Nano-CMM Probe based on Laser Trapping Technology , 1999 .

[10]  Tilo Pfeifer,et al.  Neue Konzepte für ein faserbasiertes Messsystem zur absoluten Abstandsmessung (New Concepts for a Fiber Based System for Absolute Distance Measurements) , 2003 .

[11]  Hisayoshi Sato,et al.  Contribution of CIRP to the Development of Metrology and Surface Quality Evaluation during the last fifty years , 2001 .

[12]  Guoxiong Zhang,et al.  A 3D Probe for Measuring Small Blind Holes , 1995 .

[13]  WO Wouter Pril,et al.  Development of high precision mechanical probes for coordinate measuring machines , 2002 .

[14]  Masahiko Hiraki,et al.  Development of Pneumatic Ball Probe for Measuring Small Hole , 1997 .

[15]  S. M. Harb,et al.  Observations of Contact Measurements Using a Resonance-Based Touch Sensor , 1998 .

[16]  Yuchun Xu,et al.  A System for Measuring High-reflective Sculptured Surfaces Using Optical Noncontact Probe , 2001 .

[17]  Marek Dobosz,et al.  Metrological feasibilities of CMM touch trigger probes. Part I: 3D theoretical model of probe pretravel , 2003 .

[18]  Eric Lebrasseur,et al.  A new characterization tool for vertical profile measurement of high-aspect-ratio microstructures , 2002 .

[19]  K. J. Stout,et al.  A probing question: A customer's investigation into the directional variability of a coordinate measuring machine touch trigger probe , 1997 .

[20]  Phj Piet Schellekens,et al.  Development of a 2D probing system with nanometer resolution , 1997 .

[21]  Makoto Abe,et al.  Surface inspection using optical fiber sensor , 1991, Optics & Photonics.

[22]  K. J. Stout,et al.  Some performance characteristics of a multi-axis touch trigger probe , 1997 .

[23]  Andrew Lewis,et al.  Design for a compact high-accuracy CMM , 1999 .

[24]  Kazuo Yamazaki,et al.  Noncontact Probe for Continuous Measurement of Surface Inclination and Position Using Dynamic Irradiation of Light Beam , 1993 .

[25]  Gui Yun Tian,et al.  A miniaturised sensor for deep hole diameter measurement , 1999 .

[26]  T. G. King,et al.  Factors which influence CMM touch trigger probe performance , 1998 .

[27]  Yoshio Kojima,et al.  A laser-applied three-dimensional profile measuring system , 1986 .

[28]  Kuang-Chao Fan,et al.  Development of a low-cost autofocusing probe for profile measurement , 2001 .

[29]  Mikrotaster für Anwendungen in der taktilen Wegmesstechnik (Micro Probe for Dimensional Metrology) , 2003 .

[30]  H. Weber,et al.  Functionality-oriented evaluation and sampling strategy in coordinate metrology , 1995 .

[31]  Kuang-Chao Fan,et al.  Error analysis for a diffraction grating interferometric stylus probing system , 2001 .

[32]  H Han Haitjema,et al.  Metrology for MEMS; MEMS for Metrology , 2003 .

[33]  Stephanus Buettgenbach,et al.  Silicon three-axial tactile probe for the mechanical characterization of microgrippers , 2001, Optics East.

[34]  Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer , 1999 .

[35]  A. Weckenmann,et al.  The Influence of Measurement Strategy on the Uncertainty of CMM-Measurements , 1998 .

[36]  C. Butler,et al.  A 3-D noncontact trigger probe for coordinate measuring machines , 1996 .

[37]  Werner Lotze,et al.  ScanMax — a novel 3D coordinate measuring machine for the shopfloor environment , 1996 .

[38]  Takahisa Masuzawa,et al.  Vibroscanning Method for Nondestructive Measurement of Small Holes , 1993 .

[39]  William T. Estler,et al.  Large-Scale Metrology – An Update , 2002 .

[40]  M. Kaiser,et al.  A probe for the measurement of diameters and form errors of small holes , 1998 .

[41]  Phj Piet Schellekens,et al.  Assessment of Dynamic Errors of CMMs for Fast Probing , 1995 .

[42]  S. Büttgenbach,et al.  Recent developments in dimensional metrology for microsystem components , 2002 .

[43]  Albert Weckenmann,et al.  Acceptance of processes: do we need decision rules? , 2000 .

[44]  Herbert Edelsbrunner,et al.  Algorithms in Combinatorial Geometry , 1987, EATCS Monographs in Theoretical Computer Science.

[45]  Steven D. Phillips,et al.  Error compensation for CMM touch trigger probes , 1996 .

[46]  J. R. RenéMayer,et al.  3D characterisation, modelling and compensation of the pre-travel of a kinematic touch trigger probe , 1996 .

[47]  H Han Haitjema,et al.  Development of a Silicon-based Nanoprobe System for 3-D Measurements , 2001 .

[48]  Werner Lotze.  Precision length measurement by computer-aided coordinate measurement , 1986 .

[49]  P. M. Lonardo,et al.  Emerging trends in surface metrology , 2002 .

[50]  G Zhang.  A Trinocular Vision Probe for Sculptured Surface Measurements , 2004 .

[51]  Eric Lebrasseur,et al.  Resonant-type Micro-probe for Vertical Profiler , 2000 .

[52]  Yueh-Jaw Lin,et al.  A new algorithm for determining a collision-free path for a CMM probe , 1999 .

[53]  Barry E. Jones,et al.  Sensors in industrial metrology , 1987 .

[54]  Phj Piet Schellekens,et al.  Development of a fast mechanical probe for coordinate measuring machines , 1998 .

[55]  Phj Piet Schellekens,et al.  Accuracy Limitations of Fast Mechanical Probing , 1996 .

[56]  Neil A. Duffie,et al.  Two Dimensional Tracing and Measurement Using Touch Trigger Probes , 1982 .

[57]  Paulo Augusto Cauchick Miguel,et al.  A review on methods for probe performance verification , 1998 .

[58]  Vladimir Nesterov,et al.  Novel three-axis silicon probe with integrated circuit on chip for microsystem components , 2003, SPIE Microtechnologies.

[59]  Takahisa Masuzawa,et al.  Twin-Probe Vibroscanning Method for Dimensional Measurement of Microholes , 1997 .

[60]  R. Thalmann,et al.  Novel 3D analogue probe with a small sphere and low measurement force , 2003 .

[61]  Marco Santochi,et al.  Sensor technology in assembly systems , 1998 .

[62]  Arthur Ashkin,et al.  Optical Levitation by Radiation Pressure , 1971 .

[63]  John A. Bosch,et al.  Coordinate Measuring Machines and Systems , 1995 .

[64]  Tilo Pfeifer,et al.  Optical Methods for Dimensional Metrology in Production Engineering , 2002 .

[65]  C. Butler,et al.  Error compensation of touch trigger probes , 1996 .

[66]  S. Bütefisch,et al.  Miniaturisierter 3D-Tastsensor für die Metrologie an Mikrostrukturen , 1999 .

[67]  Youfu Li,et al.  Method for determining the probing points for efficient measurement and reconstruction of freeform surfaces , 2003 .

[68]  John P Bentley,et al.  Principles of measurement systems , 1983 .

[69]  Pierre Bourdet,et al.  Quality of 3D digitised points obtained with non-contact optical sensors , 2002 .

[70]  V. V. Gorbunov,et al.  Analysis of molecular scale roughness effect on contact of solids based on computer modeling , 1995 .

[71]  Andrew Lewis.  Fully traceable miniature CMM with submicrometer uncertainty , 2003, SPIE Optics + Photonics.

[72]  Yin-Lin Shen,et al.  Pretravel compensation for vertically oriented touch-trigger probes with straight styli , 1997 .

[73]  Kazuo Yamazaki,et al.  Optical Sensor for Detecting a Position and an Inclination , 1996 .

[74]  Steven D. Phillips,et al.  Practical aspects of touch-trigger probe error compensation , 1997 .

[75]  Herbert Edelsbrunner,et al.  Weighted alpha shapes , 1992 .

[76]  W. G. Weekers,et al.  Compensation for dynamic errors of coordinate measuring machines , 1997 .

[77]  Heinrich Schwenke,et al.  Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate Measuring Machines , 2001 .

[78]  D. Olness.  LASER DAMAGE THRESHOLD IN NaCl CRYSTALS , 1966 .

[79]  Takeshi Kishinami,et al.  A New Method for Detecting the Contact Point between a Touch Probe and a Surface , 1989 .

[80]  Stuart T. Smith,et al.  Resonance-based vector touch sensors , 2003 .

[81]  E. T. Treywin.  Trends in measurement , 1979 .