Silica-on-silicon waveguide integrated polydimethylsiloxane lab-on-a-chip for quantum dot fluorescence bio-detection.

Integration of microfluidics and optical components is an essential requirement for the realization of optical detection in lab-on-a-chip (LOC). In this work, a novel hybrid integration of silica-on-silicon (SOS) waveguide and polydymethylsiloxane (PDMS) microfluidics for realizing optical detection based biochip is demonstrated. SOS is a commonly used platform for integrated photonic circuits due to its lower absorption coefficient of silica and the availability of advanced microfabrication technologies for fabricating complicated optical components. However, the fabrication of complex microfluidics circuits on SOS is an expensive process. On the other hand, any complex 3D and high-aspect-ratio microstructures for the microfluidic applications can be easily patterned on PDMS using soft lithography. By exploring the advantages of these two materials, the proposed hybrid integration method greatly simplifies the fabrication of optical LOC. Two simple technologies--namely, diamond machining and soft lithography--were employed for the integration of an optical microfluidic system. Use of PDMS for the fabrication of any complex 3D microfluidics structures, together with the integration of low loss silica-on-silicon photonic waveguides with a straight microfluidic channel, opens up new possibilities to produce low-cost biochips. The performance of SOS-PDMS-integrated hybrid biochip is demonstrated with the detection of laser induced fluorescence of quantum dots. As quantum dots have immense application potential for biodetection, they are used for the demonstration of biodetection.

[1]  Igor L. Medintz,et al.  Multiplexed toxin analysis using four colors of quantum dot fluororeagents. , 2004, Analytical chemistry.

[2]  E. Ikawa,et al.  Reactive ion etching lag on high rate oxide etching using high density plasma , 1995 .

[3]  Louis Pasteur.  Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching , 2006 .

[4]  Darwin R. Reyes,et al.  Micro total analysis systems. 1. Introduction, theory, and technology. , 2002, Analytical chemistry.

[5]  B. Gale,et al.  A monolithic PDMS waveguide system fabricated using soft-lithography techniques , 2005, Journal of Lightwave Technology.

[6]  F. J. Gracia,et al.  A SU-8 microfluidic total analysis system integrating silicon photodiodes and buried waveguides , 2005, Conference on Electron Devices, 2005 Spanish.

[7]  M. Packirisamy,et al.  Low resistive silicon substrate as an etch-stop layer for drilling thick SiO2 by spark assisted chemical engraving (SACE) , 2011 .

[8]  Shuichi Shoji,et al.  An all SU-8 microfluidic chip with built-in 3D fine microstructures , 2006 .

[9]  A Paul Alivisatos,et al.  Room-temperature single-nucleotide polymorphism and multiallele DNA detection using fluorescent nanocrystals and microarrays. , 2003, Analytical chemistry.

[10]  Brian N. Johnson,et al.  An integrated microfluidic device for influenza and other genetic analyses. , 2005, Lab on a chip.

[11]  Yanbin Li,et al.  Simultaneous detection of Escherichia coli O157:H7 and Salmonella Typhimurium using quantum dots as fluorescence labels. , 2006, The Analyst.

[12]  Darwin R. Reyes,et al.  Micro total analysis systems. 2. Analytical standard operations and applications. , 2002, Analytical chemistry.

[13]  Uwe Karst,et al.  Recent developments in optical detection methods for microchip separations , 2006, Analytical and bioanalytical chemistry.

[14]  Krishnashree Achuthan,et al.  Investigation of pad deformation and conditioning during the CMP of silicon dioxide films , 1996 .

[15]  A. Manz,et al.  Miniaturized total chemical analysis systems: A novel concept for chemical sensing , 1990 .

[16]  R. Haugland,et al.  Alexa Dyes, a Series of New Fluorescent Dyes that Yield Exceptionally Bright, Photostable Conjugates , 1999, The journal of histochemistry and cytochemistry : official journal of the Histochemistry Society.

[17]  Hedi Mattoussi,et al.  Avidin: a natural bridge for quantum dot-antibody conjugates. , 2002, Journal of the American Chemical Society.

[18]  Reinoud F. Wolffenbuttel,et al.  Plasma planarization for sensor applications , 1995 .

[19]  Muthukumaran Packirisamy,et al.  Silica-on-silicon (SOS)-PDMS platform integrated lab-on-a-chip (LOC) for quantum dot applications , 2010, Photonics North.

[20]  A. Manz,et al.  Micro total analysis systems. Recent developments. , 2004, Analytical chemistry.

[21]  Daniel T Chiu,et al.  Disposable microfluidic devices: fabrication, function, and application. , 2005, BioTechniques.

[22]  Jonathan M Cooper,et al.  Design and fabrication of a silica on silicon integrated optical biochip as a fluorescence microarray platform. , 2003, Biosensors & bioelectronics.

[23]  Haiyan Ou,et al.  Different index contrast silica-on-silicon waveguides by PECVD , 2003 .

[24]  M. Packirisamy,et al.  Integrated microfluidic biophotonic chip for laser induced fluorescence detection , 2010, Biomedical microdevices.

[25]  K. Mogensen,et al.  Monolithic integration of microfluidic channels and optical waveguides in silica on silicon. , 2001, Applied optics.

[26]  K. Mogensen,et al.  Integration of polymer waveguides for optical detection in microfabricated chemical analysis systems. , 2003, Applied optics.

[27]  R. Freitag,et al.  Fabrication of a versatile microanalytical system without need for clean room conditions , 2004 .

[28]  Anthony Barker,et al.  Developments in Si and SiO2 etching for MEMS-based optical applications , 2004, SPIE MOEMS-MEMS.

[29]  Igor L. Medintz,et al.  Biosensing with Luminescent Semiconductor Quantum Dots , 2006, Sensors (Basel, Switzerland).