论文信息 - Effect of thermal annealing on the sensitivity of Si-based MOS diodes to reducing gases - 字舞流文

Effect of thermal annealing on the sensitivity of Si-based MOS diodes to reducing gases

S. Nazarov | T. Davydova | L. S. Khludkova | V. Kalygina | A. Panin | V. I. Balyuba | V. Y. Gritsyk