A general procedure for the design of bulk acoustic wave filters

This article presents a procedure for the design of bulk acoustic wave (BAW) filters. The procedure consists of optimizing the modified Butterworth-Van Dyke model of each resonator, considering appropriate technological parameters. The approach is demonstrated first to design a classical aluminum nitride-based BAW filter but remains valid for other piezoelectric layers, considering either longitudinal or transverse acoustic wave coupling. The approach is finally applied to the design of a lithium niobate (LiNbO3) BAW filter for wide-band filtering applications. © 2011 Wiley Periodicals, Inc. Int J RF and Microwave CAE, 2011. © 2011 Wiley Periodicals, Inc.

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