Forging solid state microactuators through the merging of smart material and microelectromechanical systems

Microelectromechanical systems or MEMS have evolved into multiple component mechanisms. MEMS may consist of mechanical elements such as flexible beams and optical components, these elements may require precision structural pointing or manipulation. Vibrations from MEMS elements and environmental disturbances may interfere with precision motion requirements. Specific MEMS applications examined that may require microactuation control include scanning probe microscopes and microgrippers. A device merging smart material and microelectromechanical system concepts is presented as a response to MEMS active control needs. The device, approximately 2000 X 200 X 800 micrometers is a strain amplification mechanism composed of electroplated nickel. The device amplifiers stroke of piezoelectric material and is constructed using the LIGA technique. Experimental results are presented along with finite element analysis of the mechanical microamplifier indicating a viable design solution exits for solid-state microactuators.

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