A study of heat distribution and dissipation in a micromachined chemoresistive gas sensor

Abstract A micromachined chemoresistive gas sensor was studied from the point of view of heat distribution and thermal dissipation: this innovative device for environmental pollutant gas monitoring, is based on a sensitive film of semiconductor metal oxides, kept in temperature by a platinum resistor. In order to avoid electrical interactions between the film heater and the contacts for the film reading, the heater is driven by a square wave, and the film is read when no voltage is provided. Since the working temperature of the film is extremely important for its operation, it is crucial to maintain the temperature fluctuations within few degrees; to this end, in this work we study the heat distribution and dissipation of such a device, aiming to set a proper heating frequency, which will assure a right stability of the working temperature.

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