Management and verification for MEMS fabrication processes

In MEMS design many different fabrication techniques and materials are involved and the strong dependency between microstructure and fabrication process leads to application specific fabrication processes. A comprehensive management of process knowledge is required to take into account the various interdependencies and constraints occurring within a MEMS fabrication process. This paper presents an environment for the management of process knowledge and provides support for the design and verification of application specific fabrication processes.