Design and Development of Novel Micromachined Patch Antennas for Wireless Applications

Results from the design and development of novel micromachined patch antennas on silicon are presented in this paper. These structures include a thin layer of low permittivity material (SiO2, polyimide) between the antenna and the silicon substrate. The effect of the geometrical dimensions, the feeding configuration and the choice of the dielectric of the thin layer on the antennas’ performance is also extensively discussed and preliminary design rules are derived.

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