Ink-Jet-Printed Zinc–Tin–Oxide Thin-Film Transistors and Circuits With Rapid Thermal Annealing Process

We report on high-performance ink-jet-printed amorphous zinc-tin-oxide (a-ZTO) thin-film transistors (TFTs) and simple inverter circuits. The solution-processed a-ZTO layer was directly printed on source/drain electrodes and then thermally treated by using rapid thermal annealing process. The ink-jet-printed a-ZTO TFTs (W/L = 100 μm/10 μm) have shown a carrier mobility of 4.98 cm2/V · s with an on/off current ratio that is greater than 109 and a subthreshold slope of 0.92 V/dec. The a-ZTO TFT-based inverter operation was good with acceptable logic level conservation.

[1]  Hyun Jae Kim,et al.  Growth of Transparent nc-InGaO3 ( ZnO ) 2 Thin Films with Indium mol Ratios Using Solution Process , 2008 .

[2]  Sung Kyu Park,et al.  Polymeric Substrate Spin-Cast diF-TESADT OTFT Circuits , 2008, IEEE Electron Device Letters.

[3]  Doo-Hyoung Lee,et al.  Inkjet-Printed High Mobility Transparent–Oxide Semiconductors , 2009, Journal of Display Technology.

[4]  R. Larson,et al.  Marangoni effect reverses coffee-ring depositions. , 2006, The journal of physical chemistry. B.

[5]  B. Ong,et al.  Performance improvement for solution-processed high-mobility ZnO thin-film transistors , 2008 .

[6]  Graham D. Martin,et al.  Ink Jet Printing for Direct Mask Deposition in Printed Circuit Board Fabrication , 2009 .

[7]  Jun Long Lim,et al.  Self‐Organization of Ink‐jet‐Printed Triisopropylsilylethynyl Pentacene via Evaporation‐Induced Flows in a Drying Droplet , 2008 .

[8]  Chensha Li,et al.  Fabrication conditions for solution-processed high-mobility ZnO thin-film transistors , 2009 .

[9]  Hua-Chi Cheng,et al.  Transparent ZnO thin film transistor fabricated by sol-gel and chemical bath deposition combination method , 2007 .

[10]  B. Bae,et al.  High performance solution-processed amorphous zinc tin oxide thin film transistor , 2009 .

[11]  Yuning Li,et al.  Stable, solution-processed, high-mobility ZnO thin-film transistors. , 2007, Journal of the American Chemical Society.

[12]  Hyun-Soo Kim,et al.  High Performance Solution-Processed and Lithographically Patterned Zinc–Tin Oxide Thin-Film Transistors with Good Operational Stability , 2009 .

[13]  Tobin J. Marks,et al.  High performance solution-processed indium oxide thin-film transistors. , 2008, Journal of the American Chemical Society.

[14]  V. Subramanian,et al.  Inkjet-printed line morphologies and temperature control of the coffee ring effect. , 2008, Langmuir : the ACS journal of surfaces and colloids.

[15]  Yu-Jen Chang,et al.  A General Route to Printable High‐Mobility Transparent Amorphous Oxide Semiconductors , 2007 .

[16]  Y.-J. Chang,et al.  High-Performance, Spin-Coated Zinc Tin Oxide Thin-Film Transistors , 2007 .