AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS
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Bharat Bhushan | Patrik Hoffmann | Toshi Kasai | B. Bhushan | P. Hoffmann | T. Kasai | G. Kulik | L. Barbieri | Gerit Kulik | Laura Barbieri
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