Mechanisms of nano-hole drilling due to nano-probe Intense electron beam irradiation on a stainless steel

Holes with diameters of a few nanometers were drilled in a stainless steel foil using intense electron beams of 2.4nm nominal probe size from a field-emission electron gun in a high-resolution transmission electron microscope. Drilling experiments were carried out at regions of different foil thicknesses for different durations using three different condenser lens apertures. A better understanding of the mechanisms of nano-hole drilling by nano-probe electron beams has been achieved in this article. It was observed that the drilling process initiates from the bottom surface of a thin region while it initiates from the top surface for a thick region. It is concluded that material removal during nano-hole drilling is mainly by localized vaporization within the foil and drilling progresses through the formation of a row of interconnected nano-voids along the irradiated volume across the foil thickness.

[1]  Takeshi Yokota,et al.  In situ transmission-electron-microscopy investigation of melting in submicron Al-Si alloy particles under electron-beam irradiation. , 2003, Physical review letters.

[2]  F. Banhart,et al.  Carbon nanotubes as elements to focus electron beams by Fresnel diffraction , 2003 .

[3]  C. Dekker,et al.  Fabrication of solid-state nanopores with single-nanometre precision , 2003, Nature materials.

[4]  T. Kizuka,et al.  Atomic-Scale Electron Beam Processing , 1999 .

[5]  T. Ichihashi,et al.  NANOHOLES ON SILICON SURFACE CREATED BY ELECTRON IRRADIATION UNDER ULTRAHIGH VACUUM ENVIRONMENT , 1997 .

[6]  Nobuo Tanaka,et al.  Atomic desorption process in nanometre-scale electron-beam drilling of MgO in high-resolution transmission electron microscopy , 1997 .

[7]  S. Risbud,et al.  Real‐time hot‐stage high‐voltage transmission electron microscopy precipitation of CdS nanocrystals in glasses: Experiment and theoretical analysis , 1994 .

[8]  J. Corbett,et al.  An in situ transmission electron microscopy study of electron‐beam‐induced amorphous‐to‐crystalline transformation of Al2O3 films on silicon , 1993 .

[9]  Colin J. Humphreys,et al.  Novel fabrication method for nanometer‐scale silicon dots and wires , 1993 .

[10]  A. Broers,et al.  Nanometer scale pattern generation in deposited SiO2 with electron beam irradiation , 1992 .

[11]  Colin J. Humphreys,et al.  Nanometre hole formation in MgO using electron beams , 1990 .

[12]  C. Humphreys,et al.  Electron beam writing on a 20-Å scale in metal β-aluminas , 1983 .

[13]  D. Saldin,et al.  The TEM contrast of faceted voids , 1982 .

[14]  S. Amelinckx,et al.  Diffraction Contrast from Small Voids as Observed by Electron Microscopy , 1965 .