VIBRATION-DRIVEN MEMS ENERGY HARVESTER WITH VERTICAL ELECTRETS

A MEMS electret generator with vertical electrets has been developed with the aid of novel soft X-ray charging. Fluorinated parylene deposited on the comb drive is employed as the electret. The resonance frequency and the quality factor of the present early prototype are respectively 6.1 kHz and 10.2. Under external oscillation at the resonant frequency and 15 G, 0.4 Vp-p output has been obtained, which corresponds to 2 nW.

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