Defect-free wet etching through pyrex glass using Cr/Au mask
暂无分享,去创建一个
Ciprian Iliescu | Jianmin Miao | Francis E. H. Tay | F. Tay | J. Miao | C. Iliescu | Ji Jing | Ji Jing
[1] Takayuki Fujita,et al. Disk-shaped bulk micromachined gyroscope with vacuum sealing , 2000 .
[2] H. Fouckhardt,et al. Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devices , 2001 .
[3] G. Stemme,et al. Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask , 1998 .
[4] Masayoshi Esashi,et al. Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass , 2002 .
[5] L. Roylance,et al. A miniature integrated circuit accelerometer , 1978, 1978 IEEE International Solid-State Circuits Conference. Digest of Technical Papers.
[6] Ciprian Iliescu,et al. Stress control in masking layers for deep wet micromachining of Pyrex glass , 2005 .
[7] Richard A. Mathies,et al. Microfabrication Technology for the Production of Capillary Array Electrophoresis Chips , 1998 .
[8] Miko Elwenspoek,et al. Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers , 2001 .
[9] A. Evans,et al. A new masking technology for deep glass etching and its microfluidic application , 2004 .
[10] M.-A. Grétillat,et al. A New Fabrication Method for Borosilicate Glass Capillary Tubes with Lateral Inlets and Outlets , 1997 .
[11] Johan Roeraade,et al. Method for fabrication of microfluidic systems in glass , 1998 .
[12] Shuichi Shoji,et al. Low-temperature anodic bonding using lithium aluminosilicate-β-quartz glass ceramic , 1998 .
[13] H. Gamble,et al. Characterization of masking materials for deep glass micromachining , 2003 .
[14] M. Madou. Fundamentals of microfabrication , 1997 .
[15] H. John Crabtree,et al. Microfabricated device for DNA and RNA amplification by continuous-flow polymerase chain reaction and reverse transcription-polymerase chain reaction with cycle number selection. , 2003, Analytical chemistry.
[16] Yong-Kweon Kim,et al. Micro XY-stage using silicon on a glass substrate , 2002 .