Surface profiling method for large aspheres: diffraction image-forming approach

Investigation of surface profiling method for large aspheres becomes more and more important and imperative with the great development of the synchrotron radiaiton facility (SRF), since the latter puts greater demands on surface quality, shape and figure parameters of the optical elements used in itself. MEanwhile, things became more difficult because of the unique characteristics of the optics used in SRF. As a result, novel surface measurement methods and systems have to be developed to cope with such problems.