论文信息 - Soft chemistry assisted On-chip Integration of Nanostructured quartz-based Piezoelectric Microelectromechanical System - 字舞流文

Soft chemistry assisted On-chip Integration of Nanostructured quartz-based Piezoelectric Microelectromechanical System

B. Charlot | M. Bahriz | M. Gich | D. Çakıroğlu | A. Gómez | L. Picas | A. Carretero-Genevrier | R. Rathar | Claire Jolly | Nicolas Maurin | R. Garcia-Bermejo | D. Sanchez‐Fuentes