Flexible microneedle array electrode using magnetorheological drawing lithography for bio-signal monitoring

Abstract Monitoring and timely intervention are extremely important in the continuous home care. Microneedle array electrode (MAE) have been employed for the long-term bio-signal monitoring without skin preparation. We developed a novel magneto-rheological drawing lithography (MRDL) method to cost-effectively fabricate a flexible micro-needle array electrode (FMAE) for the wearable bio-signal monitoring. Flexible substrate may match closely with curved skin and maintain a stable interface between skin and electrode. The formation mechanism of microneedle array (MA) by MRDL and bio-signal recording performance of FMAE were investigated. MA can be one-step drawn from the droplet array of curable magnetorheological fluid under the assist of external magnetic field. Ti/Au film was coated on the surface of solidified MA to insure the conductivity and compatibility of FMAE. 36-FMAE consists of 6 × 6 micro-needles with an average height of 600 μm and an average tip radius of 12 μm. FMAE with 36 needles (36-FMAE) shows a better bio-signal monitoring performance in some specific situations compared with flexible dry electrode (FDE) and commercial Ag/AgCl electrode. Electrode-skin interface impedance (EII) measured by 36-FMAE is the lowest at a given low input frequency and the amplitude of electrocardiography (ECG) and electroencephalography (EEG) signals recorded by 36-FMAE is the largest. 36-FMAE can collect more distinguishable features and weaken the effect of motion artifact during the dynamical ECG recording. Therefore, 36-FMAE is a promising sensor for the wearable bio-signal monitoring in home care.

[1]  G. Konstantinidis,et al.  SU-8 microneedles based dry electrodes for Electroencephalogram , 2016 .

[2]  Jingquan Liu,et al.  A MEMS-based pyramid micro-needle electrode for long-term EEG measurement , 2013 .

[3]  Conor O'Mahony,et al.  Preliminary technological assessment of microneedles-based dry electrodes for biopotential monitoring in clinical examinations , 2012 .

[4]  Giulio Ruffini,et al.  A dry electrophysiology electrode using CNT arrays , 2005, physics/0510145.

[5]  Wei Zhou,et al.  Fabrication and impedance measurement of novel metal dry bioelectrode , 2013 .

[6]  Xiaoming Jiang,et al.  A microneedle electrode array on flexible substrate for long-term EEG monitoring , 2017 .

[7]  Francis E. H. Tay,et al.  A microfabricated electrode with hollow microneedles for ECG measurement , 2009 .

[8]  Wei Zhou,et al.  Fabrication of Micro-Needle Electrodes for Bio-Signal Recording by a Magnetization-Induced Self-Assembly Method , 2016, Sensors.

[9]  Yi Li,et al.  Microneedle Electrode Array for Electrical Impedance Myography to Characterize Neurogenic Myopathy , 2015, Annals of Biomedical Engineering.

[10]  Qing Jiang,et al.  Fabrication of a Micro-Needle Array Electrode by Thermal Drawing for Bio-Signals Monitoring , 2016, Sensors.

[11]  Ran Liu,et al.  Development of three-dimension microelectrode array for bioelectric measurement using the liquidmetal-micromolding technique , 2013 .

[12]  Wei Yuan,et al.  Magnetization-induced self-assembly method: Micro-needle array fabrication , 2016 .

[13]  Ryan F. Donnelly,et al.  A proposed model membrane and test method for microneedle insertion studies , 2014, International journal of pharmaceutics.

[14]  W. Zhou,et al.  Laser direct micromilling of copper-based bioelectrode with surface microstructure array , 2015 .

[15]  Wan Kyun Chung,et al.  Curved Microneedle Array-Based sEMG Electrode for Robust Long-Term Measurements and High Selectivity , 2015, Sensors.

[16]  Jens Haueisen,et al.  Multichannel EEG with novel Ti/TiN dry electrodes , 2015 .

[17]  N. Miki,et al.  Electroencephalogram measurement using polymer-based dry microneedle electrode , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[18]  Ashutosh Sharma,et al.  Long term biopotential recording by body conformable photolithography fabricated low cost polymeric microneedle arrays , 2015 .

[19]  Shyamal Patel,et al.  A review of wearable sensors and systems with application in rehabilitation , 2012, Journal of NeuroEngineering and Rehabilitation.

[20]  A. Banga,et al.  Low frequency sonophoresis mediated transdermal and intradermal delivery of ketoprofen. , 2012, International journal of pharmaceutics.

[21]  Peter Enoksson,et al.  Micromachined electrodes for biopotential measurements , 2001 .

[22]  Pietro Salvo,et al.  A 3D printed dry electrode for ECG/EEG recording , 2012 .

[23]  Yao-Joe Yang,et al.  Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement , 2014, Sensors.

[24]  Ashley N. Johnson,et al.  Dual-task motor performance with a tongue-operated assistive technology compared with hand operations , 2012, Journal of NeuroEngineering and Rehabilitation.

[25]  Ce Wang,et al.  Electrospinning route for α-Fe2O3 ceramic nanofibers and their gas sensing properties , 2009 .

[26]  John W. Cheng,et al.  The underlying factors of the perceived usefulness of using smart wearable devices for disaster applications , 2017, Telematics Informatics.

[27]  L. A. Geddes,et al.  Historical evolution of circuit models for the electrode-electrolyte interface , 2007, Annals of Biomedical Engineering.

[28]  Wei Zhao,et al.  A Flexible Microneedle Electrode Array With Solid Silicon Needles , 2012, Journal of Microelectromechanical Systems.