Model predictive control design of a flexure-based micropositioning system

Lots of advanced micropositioning stage systems exhibit nonminimum phase (NMP) plants. The existence of unstable zeros makes many inversion principle and high-gain feedback based control methods lose their efficacy. In order to control the stage to arrive at the set-position quickly and precisely, an improved model predictive control (MPC) scheme is presented in this paper. The control scheme is devised based on the MPC framework along with a supplementary PID control. Simulation and experimental studies are carried out to verify the effectiveness of the presented control scheme in comparison with conventional PID control. The advantages and disadvantage of the control scheme dedicated micropositioning stage are discussed.

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