Pneumatic Servo Bearing Actuator with Multiple Bearing Pads for Ultraprecise Positioning
暂无分享,去创建一个
[1] Gary M. Bone,et al. Nonlinear Modeling and Control of Servo Pneumatic Actuators , 2008, IEEE Transactions on Control Systems Technology.
[2] Wei Gao,et al. Questionnaire Survey on Ultra-Precision Positioning , 2011, Int. J. Autom. Technol..
[3] Hiroshi Yabe,et al. Development of Pneumatic Servo Bearing Actuator for Nanometer Positioning , 2009, Int. J. Autom. Technol..
[4] Yoshito Yabuta,et al. A Dual-mode Pico-positioning System using Active Aerostatic Coupling , 2007 .
[5] Jiro Otsuka,et al. Development of a small ultraprecision positioning device with 5 nm resolution , 2005 .
[6] Kenji Kawashima,et al. Modelling of a Nozzle-Flapper Type Pneumatic Servo Valve Including the Influence of Flow Force , 2005 .
[7] Akira Shimokohbe,et al. Ultra Precision Positioning using Air Bearing Lead Screw. , 2000 .
[8] Hong Tan,et al. DESIGN NOTE: The design and characterization of a piezo-driven ultra-precision stepping positioner , 2000 .