Low temperature acetone detection by p-type nano-titania thin film: Equivalent circuit model and sensing mechanism

Abstract Undoped nanocrystalline anatase p-type TiO2 thin film was deposited by sol–gel method on thermally oxidized p-Si (2–5 Ω cm, 〈1 0 0〉) substrates. The thin film was characterized by X-ray Diffraction (XRD) and Field Emission Scanning Electron Microscopy (FESEM) to confirm the formation of nanocrystalline anatase titania and to determine the crystallite size (∼7 nm). The resistive sensor structure was fabricated employing two lateral Pd electrodes on top of the TiO2 sensing layer. The developed sensor was tested in the temperature range of 50–200 °C for the detection of low ppm acetone (0.5–50 ppm). The maximum response of ∼115% was obtained at 150 °C with response/recovery time of 14 s/22 s at 50 ppm acetone (in air). Moreover, the sensors were capable of detecting acetone as low as 0.5 ppm with acceptable response magnitude. As titania acetone sensors are mostly n-TiO2 based, the acetone sensing mechanism for p-TiO2 is yet to be established authentically. To address the issue, an equivalent circuit model, based on the corresponding band diagram of nanocrystalline p-TiO2 with Pd electrode, was developed to describe the electron transfer mechanism through grain, grain boundary and Pd electrode under the influence of acetone vapor.