论文信息 - Smart-cut-like laser slicing of GaN substrate using its own nitrogen - 字舞流文

Smart-cut-like laser slicing of GaN substrate using its own nitrogen

H. Amano | R. Sugiura | A. Tanaka | Y. Honda | D. Kawaguchi | Hirotaka Watanabe | Hadi Sena | Yotaro Wani | Tomomi Aratani | Toshiki Yui | Y. Igasaki