In situ analysis of carrier lifetime and barrier capacitance variations in silicon during 1.5 MeV protons implantation
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E. Gaubas | J. Vaitkus | K. Žilinskas | T. Ceponis | V. Remeikis | V. Kalendra | V. Kovalevskij | M. Gaspariūnas | A. Uleckas