论文信息 - Recrystallization of thick implanted GeSn layers with nanosecond laser annealing - 字舞流文

Recrystallization of thick implanted GeSn layers with nanosecond laser annealing

D. Rouchon | A. Chelnokov | N. Pauc | V. Reboud | F. Mazen | N. Bernier | P. Acosta Alba | M. Frauenrath | J. Hartmann | M. Bertrand | J. Chrétien | V. Calvo | L. Casiez | J. Richy