An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements.

We report on an adjustable interferometric set-up for Scanning Microwave Microscopy. This interferometer is designed in order to combine simplicity, a relatively flexible choice of the frequency of interference used for measurements as well as the choice of impedances range where the interference occurs. A vectorial calibration method based on a modified 1-port error model is also proposed. Calibrated measurements of capacitors have been obtained around the test frequency of 3.5 GHz down to about 0.1 fF. Comparison with standard vector network analyzer measurements is shown to assess the performance of the proposed system.

[1]  Henri Happy,et al.  Gigahertz characterization of a single carbon nanotube , 2010 .

[2]  Pavel Kabos,et al.  Frequency-selective contrast on variably doped p-type silicon with a scanning microwave microscope , 2012 .

[3]  K. Haddadi,et al.  A 60 Ghz Scanning Near-Field Microscope With High Spatial Resolution Sub-Surface Imaging , 2011, IEEE Microwave and Wireless Components Letters.

[4]  V.V. Talanov,et al.  Near-Field Scanning Microwave Microscope for Interline Capacitance Characterization of Nanoelectronics Interconnect , 2009, IEEE Transactions on Microwave Theory and Techniques.

[5]  Steven M. Anlage,et al.  Nanometer-scale material contrast imaging with a near-field microwave microscope , 2007 .

[6]  N. Lavrik,et al.  Scanning Near‐Field Microwave Microscopy of VO2 and Chemical Vapor Deposition Graphene , 2013 .

[7]  S. M. Sze,et al.  Physics of semiconductor devices , 1969 .

[8]  J. Niegemann,et al.  A calibration algorithm for nearfield scanning microwave microscopes , 2012, 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO).

[9]  D. W. van der Weide,et al.  Quantitative scanning near-field microwave microscopy for thin film dielectric constant measurement. , 2008, The Review of scientific instruments.

[10]  Samuel J. Mason,et al.  Feedback Theory-Some Properties of Signal Flow Graphs , 1953, Proceedings of the IRE.

[11]  X. Xiang,et al.  Quantitative microwave near-field microscopy of dielectric properties , 1998 .

[12]  F. C. Wellstood,et al.  Surface resistance imaging with a scanning near-field microwave microscope , 1997, cond-mat/9712142.

[13]  T. M. Wallis,et al.  Calibrated nanoscale capacitance measurements using a scanning microwave microscope. , 2010, The Review of scientific instruments.

[14]  M. Kazimierczuk,et al.  Sensitivity and resolution of evanescent microwave microscope , 2006, IEEE Transactions on Microwave Theory and Techniques.