Broadband Brightfield Inspection Enables Advanced Immersion Lithography Defect Detection

These optical properties vary with differing materials and defect types, and are also a function of the illumination wavelength and optical apertures. As the combination of materials employed in the immersion litho cell varies widely over different layers, products and fabs, the use of a brightfield inspector with a tunable broadband illuminator and selectable apertures ensures maximum sensitivity over a broad range of immersion litho materials and defect types.